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I could not resist - N00DL3

rc3-mcr - Hardware & Making - 12/30/2020

Photoresists are one of the essential ingredients for chip manufacturing and micro/nano engineering.
We will show how we’re using them in a DIY Electron Beam Lithography set-up and how you’re able to cook your own cheap resists and mix your own developers.




Resists? What's that?




EBL? What's that?




DIY cooking of PMMA based resists




Composition of different developers




Applications



The EBL exposure process



Stuff comes together




More Examples



Thanks & Credits



Q & A





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